MEEG 450 : MEMS

Explore the fundamentals of MEMS (Micro-Electro-Mechanical Systems), MEMS applications, and various micro/nanofabrication processes. Learn MEMS devices' design considerations such as stress/strain, fluid flows, and heat transmission in micro/nanoscale and materials for MEMS. Be introduced to various microsystem fabrication processes such as photolithography, oxidation, chemical vapor deposition, etching, etc. Collaborate with peers to design microsystems and present your ideas through the group project.